| AVS 64th International Symposium & Exhibition | |
| Advanced Ion Microscopy Focus Topic | Thursday Sessions |
| Session HI+NS+TR-ThA |
| Session: | Novel Beam Induced Surface Analysis and Nano-Patterning |
| Presenter: | Matthew Burch, Oak Ridge National Laboratory |
| Authors: | M.J. Burch, Oak Ridge National Laboratory A.V. Ievlev, Oak Ridge National Laboratory M.G. Stanford, University of Tennessee B. Lewis, University of Tennessee X. Sang, Oak Ridge National Laboratory S. Kim, Oak Ridge National Laboratory J. Fowlkes, Oak Ridge National Laboratory P.D. Rack, University of Tennessee R.R. Unocic, Oak Ridge National Laboratory A. Belianinov, Oak Ridge National Laboratory O.S. Ovchinikova, Oak Ridge National Laboratory |
| Correspondent: | Click to Email |
The next generation of computing, the generation which will follow the end of Moore’s law, will need materials processing and interconnects that exist in 3-dimensions. This need has led to multiple investigations into the fabrication of complex free standing 3-dimensional structures onto any substrate at the nano-scale. Several techniques are currently being developed to fabricate free-standing micro- and nano- level structures including two-beam photon lithography and focused electron beam induced deposition (FEBID). Recent advancements in FEBID has led to the ability to simulate and subsequently fabricate complex 3D-platinum structures from an organometallic precursor.
In this work, we demonstrate the ability of the helium ion microscope (HIM) to fabricate complex 3-dimensional structures using focused ion beam deposition (FIBID) at scales smaller than previously demonstrated with FEBID. Using modern day image analytics we demonstrate a method we’ve successfully utilize to investigate and understand some of the most important structure-growth parameters with FIBID and how that parameter space impacts the size and morphology of created structures. These parameters include beam current, organometallic gas volume, dwell time, etc., and how these impact a grown structures length, width, and possible growth angles.
We further investigate the composition and crystalline nature utilizing scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS) in the prescence of different carrier gasses of nitrogen and oxygen. We show, that in general the morphology and chemistry is nearly identical between the two gasses, that there is a slight difference in the apparent crystalline nature between the two flow gasses.
Finally, we demonstrate the minimum size structures currently grown with FIBID and the complex nature of the way these structures can be grown. We also demonstrate the HIM’s unique ability to direct write structures repeatedly and reliably on non-conductive using the HIM’s unique charge compensation mechanisms.
Acknowledgements
This work was conducted at the Center for Nanophase Materials Sciences, which is a Department of Energy (DOE) Office of Science User Facility.