AVS 64th International Symposium & Exhibition
Exhibitor Technology Spotlight Workshops
Tuesday Sessions
Session EW-TuL
Paper EW-TuL5
Advanced Ion Beam Techniques for Thin Films and Structuring
Tuesday, October 31, 2017, 1:40 pm, Room West Hall
Session:
Exhibitor Technology Spotlight
Presenter:
Marcel Demmler,
AARD
Correspondent:
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Latest techniques using Ion Beam Technology for localized trimming of thin films to Angstrom level, CMP error correction, precision angled sidewalls, and highly adjustable selectivity of etch.