AVS 63rd International Symposium & Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM9
Advanced Manufacturing Techniques for Cold Cathode Ionization Gauges

Monday, November 7, 2016, 11:00 am, Room 104C

Session: Vacuum Measurement, Calibration, Primary and Industry Standards
Presenter: Clinton Percy, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc.
Correspondent: Click to Email
Cold cathode ionization gauges (CCIGs) have been used for decades to make high vacuum measurements on a variety of production and laboratory equipment. Interestingly, the manufacturing techniques used to produce these gauges have not appreciably changed during this same time period. Furthermore, the typical, currently marketed extended-range CCIG products involve multiple gauging technologies, which introduce additional complexity and costly design challenges. Our laboratory investigated the impact on gauge cost and performance of a variety of materials, manufacturing techniques, electronic circuit designs and sensor technologies that could be employed to produce a reduced cost CCIG that can measure an extended pressure range. The outcomes of this investigation resulted in improved design techniques which have been implemented in a prototype embodiment of a wide pressure range CCIG.