| AVS 63rd International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT-MoM |
| Session: | Vacuum Measurement, Calibration, Primary and Industry Standards |
| Presenter: | Gerardo Alejandro Brucker, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. |
| Authors: | T.R. Swinney, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. C. Percy, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. G.A. Brucker, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. |
| Correspondent: | Click to Email |
Wide range vacuum gauges are in use now, however, all rely on multiple technology sensors with various mismatched pressure responses for various gases. An overview of the problems created by multiple technologies and mismatched pressure responses along with novel solutions will be presented. A new internal geometry of a cold cathode ionization gauge has been investigated and has produced a usable pressure signal from high vacuum to atmosphere, using only one gauge and only one physical electronics mechanism, namely a gaseous discharge. A redesigned electrode structure avoids mixing differences in gauge types and their responses to different gas types when using multiple gauge types over this full range. Careful choice of the anode-to-cathode spacing can sustain a gaseous discharge with the usual electric and magnetic fields. The various electrical signals used to display a pressure read-out will be presented and compared. This was accomplished during the investigation with available control circuitry.