| AVS 63rd International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT-MoM |
| Session: | Vacuum Measurement, Calibration, Primary and Industry Standards |
| Presenter: | Tim Swinney, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. |
| Authors: | T.R. Swinney, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. C. Percy, Pressure & Vacuum Measurement Solutions, MKS Instruments, Inc. |
| Correspondent: | Click to Email |
A novel wide range cold cathode ionization gauge (CCIG), capable of measuring pressures from high vacuum to atmosphere and relying on only one gauge and only one physical electronics mechanism, was recently developed in our laboratory. Many technical challenges exist in operating a CCIG above the standard 10-2 Torr upper limit of the current CCIGs available on the market. We will present detailed operational aspects of our new sensor technology including: (1) selection criteria for the discharge characteristics used to derive pressure measurements, (2) accuracy of the pressure measurements produced and (3) long term stability and lifetime of the technology over its wide pressure range.