AVS 63rd International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF2-ThM

Paper TF2-ThM12
Pyrolysis of Organic-Inorganic Hybrid Materials Formed by Sequential Organometallic Vapor Infiltration

Thursday, November 10, 2016, 11:40 am, Room 105A

Session: Area-selective Deposition and Sequential Infiltration Synthesis
Presenter: Halil Akyildiz, Uludag University, Turkey
Authors: H.I. Akyildiz, Uludag University, Turkey
P.D. Bradford, North Carolina State University
J.S. Jur, North Carolina State University
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Organic inorganic hybrid materials are of interest for wide variety of applications including flexible electronics and catalysis. This work explores the use of a sequential vapor infiltration (SVI) process by which organometallic ALD precursors are infiltrated into the bulk polymer materials and react with the available functional sites to form a network of organic-inorganic hybrid materials. In this study, thermal degradation characteristics of the SVI hybrid materials are studied with thermogravimetric analysis (TGA) under inert atmosphere. Higher thermal stability of the fibers of SVI hybrid materials is observed compared to the pristine PET fibers and different degradation steps in TGA are defined. Furthermore, increased thermal stability of hybrid materials is demonstrated by pyrolysis of SVI treated nylon-6 and polyester fiber mats at 900°C with high heating rates (up to 200°C/min). It is shown by SEM imaging that fabrics with SVI treatment retain their fibrous structure and high surface area, whereas pristine fabric samples are either completely degraded. Raman spectroscopy analysis of these carbon fibers confirms the graphitic and disordered carbon structures formation.