| AVS 63rd International Symposium & Exhibition | |
| Surface Science | Wednesday Sessions |
| Session SS+2D-WeM |
| Session: | Synthesis, Characterization, and Surface Science of Novel Materials and Interfaces |
| Presenter: | Timothy Peshek, Case Western Reserve University |
| Authors: | T.J. Peshek, Case Western Reserve University J.M. Burst, National Renewable Energy Laboratory T. Coutts, National Renewable Energy Laboratory T.A. Gessert, National Renewable Energy Laboratory |
| Correspondent: | Click to Email |
We deposited high quality tin-oxide-doped indium oxide (ITO) by RF magnetron sputtering with varying oxygen partial pressure in the sputter ambient and using targets with a nominal concentration of 5 wt% SnO2, instead of a typical 10 wt%, and between 0-3 wt% ZrO2. We demonstrate mobilities of $>$45 cm2/Vs for sputtered ITO films at zero added oxygen. We demonstrate resistivities in the range of 10-5 Ω-cm at zero added oxygen with 1 wt% ZrO2 added, mobilities at >55 cm2/Vs and the films showed a modest increase in optical transmission with increasing Zr-content.orptio
Hypothetically the increase in mobility that apparently accompanies the addition of ZrO2 yields enhanced optical clarity in the IR due to reduced free carrier absorption from reduced doping concentration for any given resistivity.
Anomalous behavior was discovered for films with no Zr-added, where a bimodality of high and low mobilities were discovered for nominally similar growth conditions. We examined this anomalous behavior using modern data science and visualization techniques of big data and materials informatics. We used these techniques to gain insights into the mechanistic behavior of the relationship between stoichiometry, process variables, material morphology and electrical properties. We will summarize these findings and describe the methods used in the analysis and a path forward for continuing utilizing data analytics in material characterization and learning.