| AVS 63rd International Symposium & Exhibition | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE-TuP |
| Session: | Advanced Surface Engineering Poster Session |
| Presenter: | Zachariah Koyn, University of Illinois at Urbana-Champaign |
| Authors: | Z. Koyn, University of Illinois at Urbana-Champaign B. Holybee, University of Illinois at Urbana-Champaign J.P. Allain, University of Illinois at Urbana-Champaign |
| Correspondent: | Click to Email |
Ion beams have been shown to create nano-scale surface patterning on polycrystalline thin metal films, including ripples and dots [1,2]. Additionally, oxygen ion beams have been shown to induce fluence-dependent surface oxidation on metal surfaces [3]. This work seeks to unravel the directed irradiation synthesis of metal oxide thin-films and nanostructures, specifically ZnO, with irradiation-driven mechanisms on dissimilar, polymer-based substrates via in-situ, in-operando high-pressure XPS. This examines the dual effects of oxygen irradiation as a means to both oxidize and pattern metal thin-films at ambient temperatures. This represents a scalable process in growing and functionalizing metal-oxide thin-films on polymers, which are sensitive to the high temperatures required in thermal oxidation processes. Recent work utilized a single ion beam to simultaneously irradiate and sputter deposit metal impurities on Si, creating nanostructures [4]. The work here decouples these processes by using two ion beams to independently control the metal deposition and surface modification fluxes and energy distributions. The ratio of these fluxes is the primary tool used to explore the creation and control over size and shape of nanostructures. Beam energies of 500-1500 eV are used at ambient temperatures to protect the substrate, with an inert beam used for metal sputter deposition and both inert and reactive (O2+) normal incidence beams used for surface modification. Both Si and PDMS substrates are explored with fluences of 1E16–1E18 ions/cm2. Surface chemistry is monitored in-operando in the new Ion-Gas-Neutral Interactions with Surfaces (IGNIS) facility. XPS is performed at pressures up to 5 mTorr, allowing for the real-time monitoring of Zn deposition and oxidation. The ability to functionalize flexible, transparent substrates with metal-oxide nanostructures offers exciting applications in areas such as flexible and wearable electronics, gas sensors, biosensors, and photonics [5].
[1] D. Ghose, J. Phys. Condens. Matter 21, 224001 (2009).
[2] P. Gailly, C. Petermann, P. Tihon, and K. Fleury-Frenette, Appl. Surf. Sci. 258, 7717 (2012).
[3] N. V. Alov, Nucl. Instruments Methods Phys. Res. Sect. B Beam Interact. with Mater. Atoms 256, 337 (2007).
[4] K. Zhang, M. Brötzmann, and H. Hofsäss, AIP Adv. 2, 0 (2012).
[5] I.-S. Hwang, Y.-S. Kim, S.-J. Kim, B.-K. Ju, and J.-H. Lee, Sensors Actuators B Chem. 136, 224 (2009).