AVS 63rd International Symposium & Exhibition | |
MEMS and NEMS | Thursday Sessions |
Session MN+2D+NS-ThA |
Session: | Focused Session on Atomic Layer Nanomechanics and 2D MEMS |
Presenter: | Chandan Samanta, Indian Institute of Science, India |
Authors: | C. Samanta, Indian Institute of Science, India P. Gangavarapu, Indian Institute of Science, India A.K. Naik, Indian Institute of Science, India |
Correspondent: | Click to Email |
Molybdenum-disulphide (MoS2), a layered material has attracted attention for nanoelectro- mechanical system (NEMS) applications due to its ultralow mass density and extraordinary mechanical properties. Along with this, its direct band gap of 1.8eV (for monolayer MoS2) offers the possibility of a new kind of transducer where its mechanical properties can be strongly coupled to its optical properties in visible range. MoS2-NEMS has been realized recently using optical detection technique. This approach has its own difficulties to drive the resonator into nonlinear regime. On the other hand, mechanical nonlinearities play a crucial role in the performance of NEMS as its dimension shrinks down to atomically thin membrane. A clear understanding of nonlinear effects and the ability to control them are important from both fundamental and application points of view. In this report, we demonstrate fabrication of few layer MoS2-NEMS and its characterization by three distinct all electrical actuation and detection schemes. We are able to detect multiple vibrational modes in our devices using all the three schemes. We are also able to drive the devices deep into nonlinear regime. Our devices show strong nonlinear coupling between multiple modes. The nonlinear modal coupling is so strong that it leads to multiple internal resonances. Although, there is a report on internal resonance in micromechanical system (MEMS), there is no reported evidence of internal resonance in NEMS made from atomically thin membrane. The observed internal resonances in our devices open the possibility for realizing high stability oscillator in very high frequency range.