| AVS 62nd International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | VT-TuM1 Invited Paper Applications for Mobile Vacuum Environments in Semiconductor Manufacturing Daniel Babbs, Brooks Automation |
| 8:40am | VT-TuM3 Invited Paper Experience of UHV Transportation of Critical Components Paolo Michelato, Italian National Institute for Nuclear Physics (INFN), Italy |
| 9:20am | VT-TuM5 Invited Paper Particle Behavior in Vacuum Systems: Protection Schemes for EUVL Critical Surfaces, Speed Controlled Particle Injection, Prevention of Particle Formation during Pump Down D. Pui, Shawn Chen, University of Minnesota |
| 11:40am | VT-TuM12 Differentially Pumped Interface to Transfer Environmentally Sensitive Materials Designed with Built-in figures of Merit Hugo Celio, University of Texas at Austin |