| AVS 62nd International Symposium & Exhibition | |
| Plasma Science and Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | PS-MoA1 Invited Paper Submillimeter Studies of Molecular Plasmas: Applications to Semiconductor Plasma Processing Frank De Lucia, Ohio State University |
| 3:00pm | PS-MoA3 Using Broadband Absorption Spectroscopy to Elucidate Energy Partitioning and its Impact on Surface Reactivity Joshua Blechle, A.R. Hanna, E.R. Fisher, Colorado State University |
| 3:20pm | PS-MoA4 CF3+ Fragmentation by Electron Impact Ionization of Perfluoro-Vinyl-Ethers Yusuke Kondo, K. Ishikawa, T. Hayashi, Y. Miyawaki, K. Takeda, H. Kondo, M. Sekine, M. Hori, Nagoya University, Japan |
| 3:40pm | PS-MoA5 A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl2, O2 and Mixtures M. Foucher, D. Marinov, P. Chabert, LPP-CNRS, Ecole Polytechnique, France, A. Agarwal, S. Rauf, Applied Materials Inc., Jean-Paul Booth, LPP-CNRS, Ecole Polytechnique, France |
| 4:00pm | PS-MoA6 Optical Emission Diagnostics for Detection of High Energy Electrons in Argon Plasmas Shicong Wang, J. Boffard, C.C. Lin, A.E. Wendt, University of Wisconsin - Madison |
| 4:20pm | PS-MoA7 Plasma Characteristics in a Dual-Frequency Inductively Coupled Plasma Source for the Etch Tool Vladimir Nagorny, Mattson Technology, V. Godyak, RF Plasma Consulting |
| 4:40pm | PS-MoA8 Spatial Oscillations and Frequency Shifts in Pulsed Capacitively Coupled Plasmas John Poulose, L.J. Overzet, The University of Texas at Dallas, S. Shannon, North Carolina State University, D. Coumou, MKS Instruments, M.J. Goeckner, The University of Texas at Dallas |
| 5:00pm | PS-MoA9 Curling Probe Measurement of Electron Density in Pulse-Modulated Plasma at High Frequency Anil Pandey, Chubu University, Japan, W. Sakakibara, DOWA Thermotech, Japan, H. Matsuoka, DOWA Thermotech, K. Nakamura, H. Sugai, Chubu University, Japan |
| 5:20pm | PS-MoA10 Detection of Biomedically Relevant Reactive Oxygen Species in Atmospheric Pressure Plasmas Sandra Schröter, J. Bredin, K. Niemi, J.P. Dedrick, University of York, UK, M. Foucher, Ecole Polytechnique, France, N. de Oliveira, D. Joyeux, L. Nahon, Synchrotron Soleil, France, J.-P. Booth, Ecole Polytechnique, France, E. Wagenaars, T. Gans, D. O'Connell, University of York, UK |