Paper VT-TuP7
Simulation of the Transporting of Sputtering Particles and Comparison of the Film Thickness Distributions between Simulations and Experiments

Tuesday, October 20, 2015, 6:30 pm, Room Hall 3

A Monte-Carlo simulation of the transporting of sputtering particles was performed, using Born-Mayer potential as the two-body potential. Film thickness distribution on the substrate was calculated and compared to experimental results obtained under the same conditions. Calculations and experiments were made for a variety of gas pressures and target-substrate (T-S) distances.

The film thickness distribution on the substrate is determined by the distribution of particle emissions from the target, gas pressure and T-S distance. Therefore, if we can control the distribution of particle emissions, the pressure and the T-S distance, we can control the film thickness distribution on the substrate. The distribution of the transparent film thickness will create the designed Moire pattern.