| AVS 62nd International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT-MoA |
| Session: | Extreme High Vacuum |
| Presenter: | Julia Scherschligt, NIST |
| Authors: | J. Scherschligt, NIST J. Fedchak, NIST M.S. Sefa, NIST |
| Correspondent: | Click to Email |
Typically NEG or ion pumps are used to achieve XHV pressures, but these are unsuitable for our application because they’re gas specific. Turbo pumps can pump all gases, but the ultimate pressure for a common turbo pump is dominated by outgassing and is in the range of about 10-10 torr. We investigate reducing the ultimate pressure of a turbo pump for XHV applications.