AVS 62nd International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF-ThP

Paper TF-ThP14
Design and Fabrication of MgF2 Protected Aluminum Mirrors for the DUV Spectral Range

Thursday, October 22, 2015, 6:00 pm, Room Hall 3

Session: Thin Films Poster Session
Presenter: Hung-Pin Chen, National Applied Research Laboratories, Taiwan, Republic of China
Authors: H.P. Chen, National Applied Research Laboratories, Taiwan, Republic of China
W.H. Cho, National Applied Research Laboratories, Taiwan, Republic of China
C.N. Hsiao, National Applied Research Laboratories, Taiwan, Republic of China
C.C. Lee, National Central University, Taiwan
Correspondent: Click to Email
Protected or enhanced aluminum is widely used for the preparation of highly reflective coatings in the DUV spectral range. The obvious choice for a coating with high reflectance above DUV Spectral Range is Al protected with MgF2. This article presents our preliminary experimental studies on processes to produce MgF2 protected aluminum mirror, the focus is placed on high reflective coatings for the DUV wavelength range above 125nm to 325nm. Aluminum layers protected with fluoride coatings have been deposited by Ion beam-assisted deposition, all the samples were deposited on fine polished fused silica substrate. The optical parameters of optical interference coatings were optimized using admittance loci analysis by the Essential MacLeod software. The corresponding properties of the films were investigated by in situ optical monitoring, surface quality of the layers has been judged by means scanning electron microscopy, and atomic force microscopy scanning. The reflectance results were measured at the BL04B Beamline of National Synchrotron Radiation Research Center (Taiwan) in DUV spectral region. The highest average reflectance of the DUV reflector (with protect coating) is about 80%. Interference coatings were added to the basic protected Al design to enhance the reflectance.