AVS 62nd International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF-ThP

Paper TF-ThP10
Self-Assembled ZnO Nanoparticles Embedded in a Silicon Oxide Matrix Produced by Reactive RF Sputtering*

Thursday, October 22, 2015, 6:00 pm, Room Hall 3

Session: Thin Films Poster Session
Presenter: MiguelAngel Melendez-Lira, Departamento de Física-Cinvestav-IPN, Mexico
Authors: A. Lara-Sanchez, Facultad de Ingenieria, Universidad Autonoma de Chihuahua, Mexico
A. Hernandez-Hernandez, Escuela Superior de Apan, Universidad Autonoma del Estado de Hidalgo, Mexico
A. Garcia-Sotelo, Departamento de Física-Cinvestav-IPN, Mexico
E. Campos, Departamento de Física-Cinvestav-IPN, Mexico
S. Gallardo-Hernandez, Departamento de Física-Cinvestav-IPN, Mexico
M. Zapata-Torres, CICATA-IPN, Legaria
J.L. Fernandez-Muñoz, CICATA-IPN, Legaria
E. Valaguez-Velazquez, UPIITA-IPN
M. Melendez-Lira, Departamento de Física-Cinvestav-IPN, Mexico
Correspondent: Click to Email

Self-assembled silicon and germanium nanoparticles embedded within a SiO2 matrix taking advantage of surface roughness have been successfully produced taking advantage of the roughness associated with the sputtering deposition process[1,2]. The aforementioned approach has been employed to explore the possibility to produce ZnO nanopartic les embedded within a silicon oxide matrix on soda-lime glass and p-silicon substrates. Silicon dioxide and metallic Zn films were deposited employing silicon and zinc targets. Oxygen content of the working plasma was modulated through argon partial pressure. X-ray diffraction characterization do not shown the presence of metallic zinc. Secondary ion mass spectroscopy shown an interdifussion of zinc throughout the SiO2 matrix. TEM micrographs indicated the presence of nanoparticles. XPS shown ZnO formation under specific growth parameters. Photoluminescence emission at room temperature for samples grown on silicon substrates was not observed. Transport properties were studied measuring the IvsV characteristics of the films. For samples grown on silicon rectifying behavior and spectral response are observed . The observed results of photoluminescence and transport properties are discussed in terms of the crystalline structure of the ZnO nanoparticles and its interaction with SiO2 matrix.

*: Partially funded by CONACyT-Mexico

[1]. Mota-Pineda, E., et al. Journal of Applied Physics 108.9 (2010): 094323.

[2] Hernández-Hernández, A., et al. Journal of Applied Physics 111.4 (2012): 044327.