| AVS 62nd International Symposium & Exhibition | |
| Advanced Surface Engineering | Monday Sessions |
| Session SE+EM+EN-MoA |
| Session: | Thin Film Technologies for Energy Storage, Conversion and Harvesting |
| Presenter: | Lirong Sun, Air Force Research Laboratory |
| Authors: | L. Sun, Air Force Research Laboratory N.R. Murphy, Air Force Research Laboratory J.G. Jones, Air Force Research Laboratory J.T. Grant, Air Force Research Laboratory |
| Correspondent: | Click to Email |
In this work, the metal - metal oxide composite films were prepared in multilayer stacks. A medium layer of silver or a mixture of silver and oxide (SiO2, Al2O3, ZnO and ITO) was embedded between the host (SiO2, Al2O3, ZnO and ITO) materials. The mixture of silver and oxide was deposited by co-sputtering the silver target and one oxide target in pure argon simultaneously using DC and pulse DC magnetron sputtering techniques. The optical constant of composite films was tailored by varying deposition time of the medium layer, deposition conditions and host material. The absorbing spectral peaks were influenced by silver content, silver particle sizes and oxide matrix. The in situ spectroscopic ellipsometry data was performed in real time during film growth to derive film thickness and optical constants. The dispersion results were further correlated with absorption spectra, film density, grain sizes and surface morphology by UV-Vis-NIR spectra, X-ray diffraction, X-ray reflectivity and scanning electron microscope measurements.