| AVS 62nd International Symposium & Exhibition | |
| Advanced Surface Engineering | Monday Sessions |
| Session SE+EM+EN-MoA |
| Session: | Thin Film Technologies for Energy Storage, Conversion and Harvesting |
| Presenter: | Yilu Li, University of Missouri-Kansas City |
| Authors: | Y.L. Li, University of Missouri-Kansas City J.W. Wrobel, University of Missouri-Kansas City M.K. Michael, University of Missouri-Kansas City |
| Correspondent: | Click to Email |
Pulsed ultraviolet light from a XeF excimer laser was used to grow thin films of zinc oxide on (111) p‑type silicon wafers within a versatile high vacuum laser deposition system. Pressure, target temperature and distance from the target to the substrate can be adjusted in the system. Scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray diffraction spectroscopy and ellipsometry had been used to analyze the structures and properties of ZnO thin film products.