AVS 62nd International Symposium & Exhibition
    Plasma Science and Technology Thursday Sessions
       Session PS-ThA

Paper PS-ThA6
Electron Beam Generated Plasmas Produced in Fluorine-Containing Gases: Characterization of Plasma-Surface Interactions

Thursday, October 22, 2015, 4:00 pm, Room 210A

Session: Plasma Sources
Presenter: Scott Walton, US Naval Research Laboratory
Authors: S.G. Walton, US Naval Research Laboratory
D.R. Boris, US Naval Research Laboratory
R.F. Fernsler, Sotera Defense Solutions, Inc.
S.C. Hernández, US Naval Research Laboratory
Tz.B. Petrova, US Naval Research Laboratory
G.M. Petrov, US Naval Research Laboratory
Correspondent: Click to Email
Electron beam generated plasmas are characterized by high plasma densities (> 10 10 cm-3) and very low electron temperatures (< 1 eV), making them well-suited for next-generation processing techniques, where high fluxes of low energy ions are desirable. In this work, we focus on characterizing the flux of species incident to substrates located adjacent to magnetically collimated electron beam generated plasmas produced in fluorine-containing gases (e.g. SF6, CxFy, etc). In particular, the type and energy of the ions at the substrate surface are measured as function of relative gas concentration and substrate-to-beam distance. These results are complimented by bulk plasma measurements and modeling and then discussed in terms of the changes in surface directed ion flux caused by changes in electron temperature and density, and electronegativity associated with the introduction of attaching gases to very low Te plasmas. This work is supported by the Naval Research Laboratory Base Program.