| AVS 62nd International Symposium & Exhibition | |
| MEMS and NEMS | Wednesday Sessions |
| Session MN+AM-WeA |
| Session: | Emerging Materials & Fabrication Technologies toward Scalable & Additive Nanomanufacturing II |
| Presenter: | Guohai Chen, Brigham Young University |
| Authors: | G.H. Chen, Brigham Young University R. Vanfleet, Brigham Young University R.C. Davis, Brigham Young University |
| Correspondent: | Click to Email |
Carbon-nanotube-templated microfabrication (CNT-M) has shown precise high aspect ratio features in interconnected geometries.1 However, the feature of isolated posts remains challenging.2 Here we developed a process which involves fabrication of CNT posts connected by supporting hedges using CNT-M followed by oxygen plasma etching to remove the sacrificial hedges. We have explored the fabrication of posts with diameters from 10-40 um and heights up to 1.3 mm using sacrificial hedges of 1-5 um in width. With the CNT template, isolated free standing posts from a variety of materials can be made. For example, silicon or silicon nitride posts can be fabricated by infiltrated with silicon or silicon nitride. The creation of hybrid carbon/metal (copper, nickel) posts can also be realized through pulse electroplating.
1. J. Song, et al. Carbon-Nanotube-Templated Microfabrication of Porous Silicon-Carbon Materials with Application to Chemical Separations. Adv. Funct. Mater., 2011, 21, 1132.
2. K. Moulton, et al. Effect of iron catalyst thickness on vertically aligned carbon nanotube forest straightness for CNT-MEMS. J. Micromech. Microeng., 2012, 22, 055004.