| AVS 62nd International Symposium & Exhibition | |
| MEMS and NEMS | Wednesday Sessions |
| Session MN+AM-WeA |
| Session: | Emerging Materials & Fabrication Technologies toward Scalable & Additive Nanomanufacturing II |
| Presenter: | Costas Grigoropoulos, University of California at Berkeley |
| Correspondent: | Click to Email |
Nanomaterials and nanotechnology offer unique opportunities for fabricating devices of novel architecture and enhanced performance and can overcome system integration issues challenging current nanomanufacturing methods that are suited to planar geometries and are confined to top-down architectures. The central motivation of our work is to develop a new manufacturing method that offers scalability and flexibility enabling nanoscale device fabrication and integration in truly three-dimensional architectures over large areas and with arbitrary densities.
The core research strategy takes advantage of ultrafast laser beam processing for generating the scaffold multi-scale structures with 100 nm feature resolution. Two-photon polymerization is used to fabricate structures of tunable properties that are sensitive to pressure, light, heat and electrical stimulation. This technique, together with ultrafast laser micro/nanomachining will be adapted to multiple beam configurations in order to increase the processing throughput. Once the template is constructed, the directed self-assembly of block copolymers will be used to produce three-dimensional materials with tailored functionality where pattern amplification will be used to push the length scale to finer dimensions.