AVS 62nd International Symposium & Exhibition
    Electronic Materials and Processing Tuesday Sessions
       Session EM-TuP

Paper EM-TuP18
Thermoelectric Figure of Merit of E-Beam-Grown Nanoscale Multilayered Bi2Te3/Sb2Te3 Thin Films

Tuesday, October 20, 2015, 6:30 pm, Room Hall 3

Session: Electronic Materials and Processing Poster Session
Presenter: Zhigang Xiao, Alabama A&M University
Authors: Z. Xiao, Alabama A&M University
S. Budak, Alabama A&M University
Correspondent: Click to Email
Nanoscale multilayered Bi2Te3/Sb2Te3 thin films were grown using the e-beam evaporation. The in-plane and cross-plane micro thermoelectric devices were fabricated using the clean room-based microfabrication techniques such as UV lithography. The e-beam-grown multilayered thin films and the fabricated thermoelectric devices were measured and characterized. The nanoscale multilayered Bi2Te3/Sb2Te3 thin films can have much higher thermoelectric figure of merit than their bulk materials. The measurement results on the electrical and thermal properties of the nanoscale multilayered thin films will be reported in the conference.