| AVS 62nd International Symposium & Exhibition | |
| Spectroscopic Ellipsometry Focus Topic | Thursday Sessions |
| Session EL+AS+BI+EM-ThA |
| Session: | Optical Characterization of Nanostructures and Metamaterials |
| Presenter: | Alyssa Mock, University of Nebraska - Lincoln |
| Authors: | A. Mock, University of Nebraska - Lincoln D. Sekora, University of Nebraska - Lincoln T. Hofmann, University of Nebraska - Lincoln E. Schubert, University of Nebraska - Lincoln M. Schubert, University of Nebraska - Lincoln |
| Correspondent: | Click to Email |
The demand for thermally stable nanostructures continues to increase as nanotechnology becomes ever more prevalent in both commercial and research applications. The high surface area of nanostructured thin films is susceptible to degradation under extreme temperatures. Scanning electron microscopy (SEM) and Mueller Matrix Generalized Ellipsometry (MMGE) were used to observe optical and structural properties of a glancing angle deposited cobalt slanted columnar thin film (SCTF) over increased annealing temperature. We show that the use of atomic layer deposition (ALD) to conformally passivate the SCTF surface provides both physical scaffolding and thermal protection during the annealing process up to 475°C as no changes in the SEM or MMGE results were present.