AVS 62nd International Symposium & Exhibition
    Applied Surface Science Thursday Sessions
       Session AS-ThP

Paper AS-ThP10
Going Beyond Visualization: Exploiting Synergies Between Electron Microscopy and ToF-SIMS

Thursday, October 22, 2015, 6:00 pm, Room Hall 3

Session: Applied Surface Science Poster Session
Presenter: Kathryn Lloyd, DuPont Corporate Center for Analytical Sciences
Authors: K.G. Lloyd, DuPont Corporate Center for Analytical Sciences
C.D. Chan, DuPont Corporate Center for Analytical Sciences
J.R. Marsh, DuPont Corporate Center for Analytical Sciences
D.J. Walls, DuPont Corporate Center for Analytical Sciences
S. Subramoney, DuPont Corporate Center for Analytical Sciences
Correspondent: Click to Email

As is most often the case with research and development characterization challenges, no one analytical technique is able to “tell the complete story”. The combination of inorganic and organic layers and components in today’s advanced materials and display systems requires new sample preparation and analytical strategies. Natural systems such as leaves and seeds, as well as hair and skin, require molecularly specificity. A common analytical need is to be able to distinguish phases or layers at sub-micron lateral resolution, based on molecular signatures.

Electron microscopy (SEM or TEM) is often the first step towards sub-micron visualization. ToF-SIMS (secondary ion mass spectrometry) provides mass spectral data, and thus molecular specificity, with typically 1 micron lateral resolution. Since the lateral resolution of EDS, often used in conjunction with SEM to provide elemental maps, is also around 1 micron, the two techniques can be combined with the secondary electron images to provide a more complete chemical picture. Organic contamination in metal powder synthesis and feed granule coatings provide two examples.

Cross-sectional sample preparation using Focused Ion Beam (FIB) technology has allowed SEM and TEM visualization of layers and defects that could not be achieved using more traditional sample preparation approaches. A companion analysis for these types of samples is top-down ToF-SIMS depth profiling, as the depth resolution in this type of experiment is typically tens of nanometers or less. Combining the information from these two approaches is challenging and not always straightforward. Examples from displays and other layered structures will be shown.