AVS 62nd International Symposium & Exhibition
    Additive Manufacturing/3D Printing Focus Topic Thursday Sessions
       Session AM-ThP

Paper AM-ThP4
High Resolution Two Photon and 3D Holographic Lithography Structure Production and Conversion to Higher Index Materials

Thursday, October 22, 2015, 6:00 pm, Room Hall 3

Session: Additive Manufacturing/3D Printing Poster Session
Presenter: Steven Kooi, MIT Institute for Soldier Nanotechnologies
Correspondent: Click to Email

3D structured polymeric materials are produced by multi-beam laser interference or two photon direct write lithography1 using either a 355 nm pulsed Nd:YAG laser or a 780 nm Ti:Sapphire femtosecond laser. Samples are also constructed by combining the two techniques.

In order to obtain more interesting and measurable optical properties, the polymeric structures produced by holographic lithography and two-photon lithography are converted into higher index of refraction materials (Si and Ge) by atomic layer deposition, reactive ion etching and chemical vapor deposition techniques.

Optical properties of the photonic structures produced are calculated and measured by local reflectivity and transmission measurements as well as with near field scanning optical microscopy. The 3D structure quality and all steps of the transformation from polymeric to high index materials are also characterized by serial focused ion beam (FIB) milling and imaging.

[1] J. -H. Jang, C. K. Ullal, M. Maldovan, T. Gorishnyy, S. Kooi, C. Y. Koh, and E. L. Thomas, Adv. Funct. Mater 17, 3027 (2007).

2 J. P. Singer, S. E. Kooi, and E. L. Thomas, Nanoscale, 3, 2730 (2011).