AVS 61st International Symposium & Exhibition
    Advanced Surface Engineering Monday Sessions

Session SE+PS+TF-MoA
Pulsed Plasmas in Surface Engineering

Monday, November 10, 2014, 2:00 pm, Room 302
Moderators: Jolanta Klemberg-Sapieha, Ecole Polytechnique de Montreal, Canada, Michael Stueber, Karlsruhe Institute of Technology


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm SE+PS+TF-MoA1
Complex Magnetic Systems for High Power Pulsed Magnetron Sputtering
Priya Raman, I.A. Shchelkanov, J. McLain, University of Illinois at Urbana Champaign, S. Armstrong, Kurt J. Lesker Company, B. Zhang, M. Schilling, DEXTER Magnetic Technologies, D.N. Ruzic, University of Illinois at Urbana Champaign
2:20pm SE+PS+TF-MoA2
Triple Langmuir Probe and Ion Fraction Measurements in an Industrial PVD Deposition System
YuiLun Wu, S.S. Ma, I.A. Shchelkanov, D.N. Ruzic, University of Illinois at Urbana-Champaign
2:40pm SE+PS+TF-MoA3 Invited Paper
Understanding the Physics of Magnetron Discharges: Ionization Zones and Their Role in Transport of Charged Particles
Matjaž Panjan, R. Franz, A. Anders, Lawrence Berkeley National Laboratory
3:40pm SE+PS+TF-MoA6
Properties of Ionization Zones in Magnetron Sputtering Observed in the Transition Region between dc and HiPIMS
André Anders, Y. Yang, J. Liu, Y. Qiu, Lawrence Berkeley National Laboratory
4:00pm SE+PS+TF-MoA7
Observation of Multiple Charge States and High Ion Energies in High-Power Impulse Magnetron Sputtering (HiPIMS) and Burst HiPIMS using a LaB6 Target
Robert Franz, Montanuniversität Leoben, Austria, C. Clavero, Lawrence Berkeley National Laboratory, R. Bolat, Nazarbayev University, Kazakhstan, R. Mendelsberg, A. Anders, Lawrence Berkeley National Laboratory
4:20pm SE+PS+TF-MoA8
Pulsed Magnetron Sputtering of Novel Multifunctional Films
Jaroslav Vlcek, J. Rezek, J. Kohout, University of West Bohemia, Czech Republic
4:40pm SE+PS+TF-MoA9
Surface Engineering of Magnesium and Magnesium Alloys for Improved Corrosion Resistance
Michael Melia, J.R. Scully, J.M. Fitz-Gerald, University of Virginia
5:00pm SE+PS+TF-MoA10
Designing a Precious Metal-Free Catalyst for Purification of Automotive Exhausts: NO Reduction and CO Oxidation on CuO(110) Surface
H. Kasai, J. Moreno, A.A. Padama, Osaka University, Japan, C. Matsuda, K. Naito, M. Uenishi, H. Tanaka, Daihatsu Motor Co., Ltd, Japan, Y. Nishihata, Japan Atomic Energy Agency, Japan, Mamoru Sakaue, Osaka University, Japan