| AVS 61st International Symposium & Exhibition | |
| Plasma Science and Technology | Friday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | PS1-FrM1 Invited Paper Small High Density Plasma Sources for Focussed Ion Beam Applications Rod Boswell, Australian National University, Australia |
| 9:00am | PS1-FrM3 A Remote Microwave Plasma Source for Reactive Gas Generation Xing Chen, I. Pokidov, K. Wenzel, C.X. Ji, MKS Instruments, Inc. |
| 9:20am | PS1-FrM4 Mechanisms for Plasma Density Distribution Control using a Large Diameter Radial Line Slot Antenna Microwave Plasma Source Toshihiko Iwao, T. Hirano, A. Suzuki, Tokyo Electron Limited, Japan, P. Ventzek, Tokyo Electron America, K. Ishibashi, Tokyo Electron Limited, Japan |
| 9:40am | PS1-FrM5 The NEPTUNE Bipolar Source: A New Instrument for Surface Treatment Applications Dmytro Rafalskyi, A. Aanesland, LPP, CNRS - Ecole Polytechnique, France |
| 10:00am | PS1-FrM6 Process Optimization by Phase Control in Multi-Frequency Capacitive RF Plasmas Julian Schulze, E. Schuengel, West Virginia University, A. Derzsi, I. Korolov, Z. Donko, Hungarian Academy of Science, Hungary |
| 10:40am | PS1-FrM8 Controlling the Flux of Reactive Species in Electron Beam Generated Plasmas Scott Walton, D.R. Boris, E.H. Lock, S.C. Hernandez, Tz.B. Petrova, G.M. Petrov, Naval Research Laboratory |
| 11:00am | PS1-FrM9 Ignition Delay in Electronegative Pulsed Dual Source Tandem Plasmas Shyam Sridhar, L. Liu, D.J. Economou, V.M. Donnelly, University of Houston |
| 11:20am | PS1-FrM10 A Global Model for Ignition Delay of Pulsed Electronegative Plasmas Lei Liu, S. Sridhar, D.J. Economou, V.M. Donnelly, University of Houston |
| 11:40am | PS1-FrM11 Ion Energy Distribution Control Using Phase Locked Harmonic Drive A. Zafar, North Carolina State University, Y. Zhang, University of Michigan, T. Kummerer, North Carolina State University, D.H. Clark, Plasmatherm Inc., M.J. Kushner, University of Michigan, D. Coumou, MKS Instruments, Steven Shannon, North Carolina State University |