| AVS 61st International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Division Poster Session and Student Poster Contest |
| Presenter: | JongYeon Lim, Korea Research Institute of Standards and Science, Republic of Korea |
| Authors: | J.Y. Lim, Korea Research Institute of Standards and Science, Republic of Korea K.M. Choi, Korea Research Institute of Standards and Science, Republic of Korea K.M. Baik, Korea Research Institute of Standards and Science, Republic of Korea S.Y. In, Korea Atomic Energy Research Institute, Republic of Korea S.K. Lim, National Nano Fab Center, Republic of Korea D.Y. Koh, Korea Institute of Machinery and Materials, Republic of Korea W.S. Cheung, Korea Research Institute of Standards and Science, Republic of Korea |
| Correspondent: | Click to Email |
Methods of the characteristics evaluation of vacuum pumps are well-defined in the international measurement standards such as ISO, PNEUROP, DIN, JIS, and AVS. HV pumps such as TMPs and cryo-pumps, essential equipment in the advanced industry, require very objective engineering reliability for ascertaining their performance estimation.
Developmental effort for establishing reliability engineering evaluation infra-structure of TMPs and cryo-pumps has been conducted in the manner of component level test, characteristics evaluation and field tests in KRISS.
Until now reliability study for vacuum pumps is not well developed since there are so many unknown factors are prevailing in vacuum industry. However, the increasing needs for the reliability engineering in real field are continuously rising. In this reason we have currently developed the partial reliability engineering evaluation system of high vacuum pumps. In the case of TMPs and cry-pumps, we shortly try to remark the developmental flow of reliability chain in the fields as follows;
TMPs:
1. Characteristics evaluation – pumping speed, ultimate pressure, etc.
2. Endurance evaluation – Continuous starting and stopping operation (10 % to 90 % RPM)
3. Field Test – NNFC Etcher system
4. Quality assurance evaluation – magnetic field tolerance valuation system
5. Destructive test,
Cryo-pumps:
1. Component evaluation – Refrigerator evaluation
2. Characteristics evaluation – pumping speed, ultimate pressure, etc.
3. Field Test – NNFC Sputter system
4. Quality assurance evaluation .
In this presentation we suggest the methodological approach to the completion of high vacuum pump development through a reliability engineering study
Acknowledgements: Results are partially attributed to two national project (Contract No. 10031836) sponsored by the Korean Ministry of Knowledge Economy, and KRISS main project 14011016.