| AVS 61st International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Division Poster Session and Student Poster Contest |
| Presenter: | Fan-Chun Hsieh, National Applied Research Laboratories, Taiwan |
| Authors: | F.C. Hsieh, National Applied Research Laboratories, Taiwan P.H. Lin, National Applied Research Laboratories, Taiwan C.S. Yu, National Applied Research Laboratories, Taiwan F.Z. Chen, National Applied Research Laboratories, Taiwan |
| Correspondent: | Click to Email |
Scroll pumps are widely used in solar-optic and semiconductor industry for backing purpose. The performance of scroll pump could affect the operation of production line significantly. Here, we compared the performance of scroll pump before and after maintenance. The ultimate pressure and acceleration were measured. The ultimate pressure decreases slightly from 5x10-1 Torr to 2x10-2 Torr. The RMS magnitude of acceleration shows a maximum peak which occurs at about 30 Hz. Moreover, small peaks were also observed in the spectrum. The small peaks were high before maintenance compared to after maintenance. We speculated that this trend is due to the damage of ball bearing and wear of tip seal. The proposed measurements provide a considerable advancement in maintenance of pump.