AVS 61st International Symposium & Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM9
Stability of the Cold Cathode Ionization Gauge

Monday, November 10, 2014, 11:00 am, Room 303

Session: Vacuum Measurement, Calibration, and Primary Standards
Presenter: Paul Arnold, Granville-Phillips Vacuum Products
Authors: P.C. Arnold, Granville-Phillips Vacuum Products
G.A. Brucker, Granville-Phillips Vacuum Products
Correspondent: Click to Email
A study of the stability of cold cathode ionization gauges (CCIG) using an evaluation of physics principles affecting the ionization properties of the CCIG has been performed. The variation of the response to pressure of the CCIG is significantly dependent upon the interaction of the plasma discharge with the interior surfaces of the CCIG occurring during operation of the CCIG. New investigations will demonstrate these effects. The concept of measured pressure dose provides an index of likely drift in CCIG performance resultant from the magnitude of the plasma interaction, including the concept of remaining gauge useful life. The nature of the above plasma interaction changes the magnetic field internal to the CCIG as well as electron production from the cathode electrode, resulting in drift in CCIG performance. Both simulation and test data of these phenomena will be presented, showing relation of pressure dose to pressure performance with explanation of mechanisms.