AVS 61st International Symposium & Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM10
Cold Cathode Ionization Gauge Design Mitigates Well-known Performance Issues

Monday, November 10, 2014, 11:20 am, Room 303

Session: Vacuum Measurement, Calibration, and Primary Standards
Presenter: Brandon Kelly, Granville-Phillips Vacuum Products
Authors: B.J. Kelly, Granville-Phillips Vacuum Products
G.A. Brucker, Granville-Phillips Vacuum Products
Correspondent: Click to Email
Cold Cathode Ionization Gauges (CCIGs) are a well established indirect pressure measurement tool that has well documented advantages and shortcomings. In an attempt to overcome these design challenges a series of experiments have been conducted exploring different electrode geometries and configurations. Included in these experiments are high power magnet assemblies with unique discharge chamber geometries aimed at increasing device sensitivity at UHV pressures. Various modifications and methods have been tested to control the plasma discharge interaction with the interior of the CCIG for which increased lifetime will be shown. In addition to gauge sensitivity, other common shortcomings are addressed such as high vacuum starting time statistics and the separation of leakage current from plasma (i.e. discharge) current. A novel ionization chamber design prevents the escape of material from the internal surfaces of the gauge while preserving adequate conductance to the vacuum chamber and providing the ability to replace parts in the field. The theory and details of these new sensor design modifications will be discussed offering an insight into the next generation of cold cathode ionization gauges.