AVS 61st International Symposium & Exhibition
    Scanning Probe Microscopy Focus Topic Wednesday Sessions
       Session SP+AS+BI+NS+SS-WeA

Paper SP+AS+BI+NS+SS-WeA10
Advances in Imaging and Quantification of Electrical Properties at the Nanoscale using Scanning Microwave Impedance Microscopy (sMIM)

Wednesday, November 12, 2014, 5:20 pm, Room 312

Session: Advances in Scanning Probe Microscopy
Presenter: Stuart Friedman, PrimeNano, Inc
Authors: S. Friedman, PrimeNano, Inc
Y. Yang, PrimeNano, Inc
O. Amster, PrimeNano, Inc
S. Johnston, Stanford University
Correspondent: Click to Email
Scanning Microwave Impedance Microscopy (sMIM) is a novel mode for AFM-enabling imaging of unique contrast mechanisms and measurement of local permittivity and conductivity at the 10’s of nm length scale. Custom shielded AFM probes enable the system to use microwaves to probe the impedance of the tip sample interface and extract information on local electrical properties of the sample. After introducing the theory of operation, we will review the state of the art, including imaging studies of microelectronic devices as well as novel materials and nanostructures, such as graphene and patterned optical crystals and ferro-electrics. These studies reveal novel information about doping distributions, domains, domain walls and other features. In addition to imaging, the technique is suited to a variety of metrology applications where specific physical properties are determined quantitatively. We will present research results on quantitative measurements of dielectric constant (permittivity) and conductivity (e.g. dopant concentration) for a range of materials. For samples where properties such as dielectric constant are known the technique can be used to measure film thickness.