| AVS 61st International Symposium & Exhibition | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE-TuP |
| Session: | Advanced Surface Engineering Poster Session |
| Presenter: | Zachariah Koyn, University of Illinois at Urbana-Champaign |
| Authors: | Z. Koyn, University of Illinois at Urbana-Champaign B. Holybee, University of Illinois at Urbana-Champaign S.N. Srivastava, University of Illinois at Urbana-Champaign J.P. Allain, University of Illinois at Urbana-Champaign |
| Correspondent: | Click to Email |
Ion bombardment of polycrystalline thin metal films is known to induce nanometer-scale surface patterning, including ripples and dots1,2. Additionally, the irradiation of metals with oxygen ions has been shown to induce surface oxidation, with a state dependence on fluence3. This work seeks to unravel the directed irradiation synthesis of oxide-based thin-films, in particular ZnO thin-films, with low-energy irradiation-driven mechanisms on dissimilar material substrates, such as polymer-based systems. This examines the dual effects of oxygen irradiation as a method of both oxidizing and patterning metal thin-films at ambient temperatures. This represents a scalable process in growing and functionalizing metal-oxide thin-films on polymers, which are sensitive to the high temperatures required in thermal oxidation processes. Ion-beam sputtering (IBS) is known to induce surface nanopatterning in multi-component systems4 with simultaneous modification of surface chemistry. Irradiation with O+ is performed at grazing incidence near 70° with particle energies between 25-1000 eV at ambient temperatures. X-ray photoelectron spectroscopy investigates the resulting oxidation states as a function of fluence from early-stage nanopattern formation near 1015 cm-2 up to fluences nearing a coarsening regime. Atomic force microscopy examines pattern formation under similar conditions. These results are then adapted to nanostructured thin-films on flexible substrates, namely polydimethylsiloxane (PDMS) about 1-mm thick and 1-cm2. The ability to fabricate heterostructures on transparent, flexible substrates offers exciting applications in areas such as gas sensors, biosensors, and photonics5. Additional benefits of an oxygen ion beam are the chemical changes (formation of SiO groups, introduction of water and gaseous byproducts) induced in the PDMS substrate as the active thin-film is nanostructured. Oxidation of this polymer has been shown to induce significant temporary hydrophilicity6 and thus provide for an effective bioactive nanostructured biointerface for in-situ endovascular protocols.
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