| AVS 61st International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
| Session PS2-WeM |
| Session: | Plasma Modeling |
| Presenter: | Igor Kaganovich, Princeton Plasma Physics Laboratory |
| Authors: | I.D. Kaganovich, Princeton Plasma Physics Laboratory D. Sydorenko, University of Alberta, Canada A. Khrabrov, Princeton Plasma Physics Laboratory Y. Raitses, Princeton Plasma Physics Laboratory P. Ventzek, Tokyo Electron America, Inc. L. Chen, Tokyo Electron America, Inc. |
| Correspondent: | Click to Email |
The purpose of the talk is to describe recent advances in nonlocal electron kinetics in low-pressure plasmas. Partially-ionized, bounded, and weakly-collisional plasmas demonstrate nonlocal electron kinetic effects, nonlinear processes in the sheaths, beam-plasma interaction, collisionless electron heating, etc. Recently Physics of Plasmas published special topic of collected papers dedicated to “Electron kinetic effects in low temperature plasmas” in memory of the pioneer and leader of this field, Professor Lev D. Tsendin [1]. The plethora of kinetic processes supporting the non-equilibrium plasma state is an invaluable tool, which can be used to adjust plasma parameters to the specific needs of a particular plasma application. We report on recent advances in nonlocal electron kinetics in low-pressure plasmas where a non-Maxwellian electron velocity distribution function was “designed” for a specific application: in dc discharges with auxiliary biased electrodes for plasma control [2], hybrid DC/RF unmagnetized [3] and magnetized plasma sources [4], and Hall thruster discharges [5]. We show using specific examples that this progress was made possible by synergy between full-scale particle-in-cell simulations, analytical models, and experiments. Initial “academic” studies paved the way to understanding of modern plasma devices that are being developed for future plasma technology. One example is so-called non-ambipolar electron plasma, where an electron beam is extracted through a small aperture [6]. Our previous studies of extraction system [2] and collective interaction of electron beam with the plasma aides understanding and optimization of this device [6]. Another example is modeling of high power plasma switch for electric grid system [7].
References
[1] I. D. Kaganovich, V. Godyak, and V. I. Kolobov, Phys. Plasmas 20, 101501 (2013).
[2] A. S. Mustafaev, V. I. Demidov, I. D. Kaganovich, M. E. Koepke, and A. Grabovskiy, “Sharp transition between two regimes of operation of dc discharge with two anodes and thermionic emission from cathode”, to be published in Rev. Scient. Instr. (2014).
[3] K. Denpoh and P. L. G. Ventzek, J. Vac. Sci. Technol. A 26, 1415 (2008).
[4] S. Abolmasov, Plasma Sources Sci. Technol. 21 035006 (2012).
[5] Y. Raitses, I.D. Kaganovich, A. V. Khrabrov, D. Sydorenko, N.J. Fisch, and A. Smolyakov, IEEE Trans. Plasma Sci. 39, 995 (2011).
[6] L. Chen, Zh. Chen and M. Funket, Plasma Sources Sci. Technol. 22, 065015 (2013).
[7] D. M. Goebel, Rev Sci. Instr. 67, 3136 (1996).