| AVS 61st International Symposium & Exhibition | |
| MEMS and NEMS | Wednesday Sessions |
| Session MN-WeM |
| Session: | Optomechanics, Photonics, and Quantum Nanosystems |
| Presenter: | Jocelyn Westwood, University of Alberta and The National Institute for Nanotechnology, Canada |
| Authors: | J. Westwood, University of Alberta and The National Institute for Nanotechnology, Canada V.T.K. Sauer, University of Alberta and The National Institute for Nanotechnology, Canada Z. Diao, National Institute for Nanotechnology and University of Alberta, Canada W.K. Hiebert, University of Alberta and The National Institute for Nanotechnology, Canada |
| Correspondent: | Click to Email |
All-optical actuation and detection of nanomechanical devices has recently emerged as a high-bandwidth technique with high displacement sensitivity [1],[2],[3],[4],[5]. We explore optical actuation and detection of higher order vibrational modes, including even modes, in nano-optomechanical doubly clamped beams. Higher order modes have increased resonance frequencies, thereby increasing the mass sensitivity for sensing purposes and increasing the measurement bandwidth [6], [7]. Currently, higher order modes are not well studied since the symmetry of the modes causes a zero effective index shift over the vibrating beam, limiting the sensitivity of the all-optical technique. We demonstrate the fabrication of doubly clamped beams with the symmetry broken, due to a step in the substrate height under the doubly clamped beam. The doubly clamped beams are embedded in an optical racetrack resonator. This allows for the all-optical actuation and detection of the first through fifth modes of the doubly clamped beams. Additionally, the thermomechanical noise floor of the first few modes is observed.
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