| AVS 61st International Symposium & Exhibition | |
| MEMS and NEMS | Tuesday Sessions |
| Session MN+NS-TuA |
| Session: | Multi-Scale Phenomena and Bio-Inspired MEMS/NEMS |
| Presenter: | Hao Jia, Case Western Reserve University |
| Authors: | H. Jia, Case Western Reserve University P.X.-L. Feng, Case Western Reserve University J. Lee, Case Western Reserve University |
| Correspondent: | Click to Email |
We experimentally demonstrate, for the first time to our knowledge, the operation of silicon carbide (SiC) microdisk resonators in fluidic and viscous environments (particularly in water) with robust multiple flexural-mode resonances in the high and very high frequency (HF/VHF) radio band. We observe ~8 resonance modes in a 20µm-in-diameter SiC microdisk resonator with resonance frequencies up to ~120 MHz and quality Q factors as high as ~40 in water.
SiC is a highly attractive material for microelectromechanical systems (MEMS) due to its superior mechanical (e.g. high elastic modulus, EY~450 GPa), optical (wide bandgap, >2.3eV) and thermal properties (thermal conductivity of 320-490 W/[m×K]) [1].These advantages make SiC especially suitable for sensing applications in liquid for its transparency from visible to mid-infrared light and high optical power handling ability, facilitating efficient laser actuation and detection. Meanwhile, two dimensional (2D) microdisk structure exhibits multiple flexural-mode resonance characteristics, which can enhance sensing performances in liquid with the additional degrees of freedom and larger sensing area. Further, the unique biocompatibility of SiC allows potential in-liquid biosensing applications be developed.
In this study, we demonstrate the operation of high frequency SiC microdisk resonators in liquid. The SiC microdisk resonators are completely immersed in water, and are optically driven by an amplitude-modulated 405nm laser. The multimode resonances are detected with optical interferometry using a 603nm He-Ne laser. We observe ~8 resonance modes up to ~120 MHz with Qs as high as ~40 in water. To our best knowledge, both the number of resonance modes and Qs measured are the highest among flexural-mode resonators operating in water reported to date[2],[3],[4],[5]. Such high frequency SiC microdisk resonators with robust multimode resonances and high Qs in water may provide an appealing platform for particle and biological sensing applications in liquid.
[1] X. Lu, J. Y. Lee, P. X.-L. Feng, and Q. Lin, Opt. Lett. 38, 1304 (2013).
[2] S. S. Verbridge, L. M. Bellan, J. M. Parpia, and H. G. Craighead, Nano. Lett. 6, 2109 (2006).
[3] S. Sawano, T. Arie, and S. Akita, Nano. Lett. 10, 3395 (2010).
[4] J. H. Park, T. Y. Kwon, D. S. Yoon, H. Kim, and T. S. Kim, Adv. Func. Mater. 15, 2021 (2005).
[5] C. Vancura, Y. Li, J. Lichtenberg, K.-U. Kirstein, A. Hierlemann, and F. Josse, Anal. Chem. 79, 1646 (2007).