AVS 61st International Symposium & Exhibition
    Magnetic Interfaces and Nanostructures Tuesday Sessions
       Session MI+MG-TuM

Paper MI+MG-TuM13
Bit-Patterned Media Using Block Copolymer Templating on FePt

Tuesday, November 11, 2014, 12:00 pm, Room 311

Session: Advanced Materials Discovery 
Presenter: Allen Owen, University of Alabama
Authors: S. Gupta, University of Alabama
H. Su, University of Alabama
A. Owen, University of Alabama
R. Douglas, University of Alabama
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Block copolymer (BCP) templating has been used to pattern perpendicular magnetic anisotropy media. Large-area arrays of magnetic dots with diameter of ~30nm have been obtained by BCP templating in FePt films. FePt was deposited by dc cosputtering of elemental targets and in situ annealing in the sputtering system at 550°C for 1hr. The polystyrene polyferrocenyldimethylsilane (PS-b-PFS) was spin-coated onto the film and annealed to cause phase separation, followed by oxygen plasma treatment to remove the polystyrene matrix and expose the PFS nanospheres[4]. The FePt films were subsequently etched using an ion mill. Then post-patterning annealing at 600°C was also performed to reverse the ion damage of the film. SEM and XRD were utilized to characterize the morphology and structural properties respectively, while magnetometry was carried out to show the magnetic properties. Response surface methodology was performed to optimize the power, etching time and etching angle of the block copolymer mask and magnetic film. The effects of these patterning parameters on structural and magnetic properties were discussed.