| AVS 61st International Symposium & Exhibition | |
| Electronic Materials and Processing | Wednesday Sessions |
| Session EM+EN+TF-WeA |
| Session: | Thin Films and Materials for Energy Storage |
| Presenter: | Roya Maboudian, University of California at Berkeley |
| Authors: | J.P. Alper, University of California at Berkeley C.-H. Chang, University of California at Berkeley C. Carraro, University of California at Berkeley R. Maboudian, University of California at Berkeley |
| Correspondent: | Click to Email |
On-chip integrated energy storage and delivery at high power is an important aspect in realizing the full potential of microsystems technology such as remote mobile sensor platforms. One promising high power device which has garnered much attention is the supercapacitor. Energy is stored in SC's at the electrode‑electrolyte interface, making the high specific surface area of thin films of 1-d materials particularly attractive for application to these devices. However many operations such as in the chemical process industries which could benefit from remote sensor deployment reach temperatures beyond current electrode and electrolyte material constraints. Here we report on the use of bottom-up chemical vapor deposition based silicon carbide (SiC) nanowires and top-down chemically etched SiNWs passivated with an ultrathin carbon sheath as thin film micro-SC electrodes. The electrochemical performance of the two nanowire types in high temperature compatible electrolytes such as ionic liquids and yttria stabilized zirconia (YSZ) are presented. The materials are stable during cycling and achieve specific capacitance values comparable to or better than previously reported carbon electrodes. Operation at temperatures above those attainable with standard electrode-electrolyte systems is also demonstrated. Current challenges for the methods presented and strategies for overcoming them are discussed.