| AVS 60th International Symposium and Exhibition | |
| Vacuum Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | VT+EN+TF-TuA1 Invited Paper The Relationship Between Moisture Ingress, Hermeticity Testing, and Internal Gas Analysis (IGA) of Hermetic Structures J.C. Pernicka, Pernicka Corporation |
| 2:40pm | VT+EN+TF-TuA3 Invited Paper Applications and Limitations of Wear-Resistant PVD Coatings A. Mueller, OC Oerlikon Balzers AG, Liechtenstein |
| 4:00pm | VT+EN+TF-TuA7 Invited Paper Optics Contamination in EUV Lithography: Measurement, Modeling and Mitigation S.B. Hill, N.S. Faradzhev, T.B. Lucatorto, National Institute of Standards and Technology (NIST), B.V. Yakshinskiy, R.A. Bartynski, Rutgers University |
| 4:40pm | VT+EN+TF-TuA9 Extremely Clean Handling of EUV Reticles R. Versluis, E.C. Fritz, W.E. Crowcombe, TNO Technical Sciences, Netherlands |
| 5:00pm | VT+EN+TF-TuA10 Vacuum Environment Processing Studies for the Production of Commercial Thin Film Hydride Targets J.L. Provo, J. L. Provo, Consulting |
| 5:20pm | VT+EN+TF-TuA11 HBr Gas Mixture Analysis by FTIR for Non-Destructive Quality Control of Automotive Halogen Capsule Manufacturing J.N. Greene, P.F. Somssich, Osram Sylvania |