AVS 60th International Symposium and Exhibition
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP2
Performance Measurements of Scroll Pump

Tuesday, October 29, 2013, 6:00 pm, Room Hall B

Session: Vacuum Technology Poster Session and Student-Built Vacuum System Poster Competition
Presenter: F.C. Hsieh, National Applied Research Laboratories, Taiwan, Republic of China
Authors: F.C. Hsieh, National Applied Research Laboratories, Taiwan, Republic of China
P.H. Lin, National Applied Research Laboratories, Taiwan, Republic of China
C.W. Chen, National Applied Research Laboratories, Taiwan, Republic of China
J.S. Kao, National Applied Research Laboratories, Taiwan, Republic of China
F.Z. Chen, National Applied Research Laboratories, Taiwan, Republic of China
Correspondent: Click to Email
Scroll pumps are widely used in solar-optic and semiconductor industry for backing purpose. The performance of scroll pump could affect significantly the performance of pumping station. Here, a condition monitoring of scroll pump was developed and monitored through LabVIEW. The pumping speed, acceleration, and noise level were measured for mass flow rate ranges from 50 to 200 sccm (standard cubic centimeter per minute). The pumping speed increases sharply and almost linearly when inlet pressure smaller than 0.307 mbar. The RMS magnitude of acceleration shows a maximum peak which occurs at about 30 Hz. Moreover, small peaks were observed in the spectrum because of the reciprocating motion of the pump. The noise level fluctuates obviously at inlet pressure approaches 1 mbar. The proposed measurements provide a considerable advancement in diagnosis development of pump.