AVS 60th International Symposium and Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM8
Evaluation and Discussion of Performance Characteristics of Modern-Day Cold Cathode Ionization Gauges

Monday, October 28, 2013, 10:40 am, Room 202 C

Session: Vacuum Measurement and Metrology
Presenter: P.C. Arnold, Brooks Automation, Inc., Granville-Phillips Products
Authors: P.C. Arnold, Brooks Automation, Inc., Granville-Phillips Products
T.C. Swinney, Brooks Automation, Inc., Granville-Phillips Products
B.J. Kelly, Brooks Automation, Inc., Granville-Phillips Products
Correspondent: Click to Email
Cold Cathode Ionization Gauges (CCIGs), as in all high and ultrahigh vacuum gauges, possess a myriad of idiosyncrasies which will be discussed. The basic physical electronics of the CCIG will be the basis for discussion of gauge characteristics. The physical electronics source of these characteristics will be pursued in terms of geometry, electric fields, magnetic fields, and common methods of use. The CCIG is found to solve many user environment operation issues and has many good points. The discussion of causes and possible theoretical remedies will address various issues at many regions of the common pressure-use regimes, including both the high and low ends of use. The role of magnet design and its contribution to magnetic fields internal to the gauge will be evaluated in interaction with the applied electric field. Computer simulation of these interactions will be displayed to aid in the understanding of the CCIG operation.