AVS 60th International Symposium and Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoA

Paper VT-MoA6
Capacitance Diaphragm Gauges with Sub-Millisecond Measuring Rate

Monday, October 28, 2013, 3:40 pm, Room 202 C

Session: Dynamic Vacuum Processes and Outgassing
Presenter: Ch. Berg, INFICON Ltd, Liechtenstein
Authors: Ch. Berg, INFICON Ltd, Liechtenstein
M. Wuest, INFICON Ltd, Liechtenstein
F. Mullis, INFICON Ltd, Liechtenstein
H. Hanselmann, INFICON Ltd, Liechtenstein
Correspondent: Click to Email
Capacitance Diaphragm Gauges (CDG) are used in many pressure control applications in industry. In a typical application the CDG pressure signal is used in the butterfly valve controller to regulate the pressure in a vacuum chamber. The control loop performance is often limited by the measuring rate of the vacuum gauge. Currently the fastest commercially available CDG has a time constant of about 8 ms, while most CDGs have rates between 20 and 30 ms. In this talk we will present a CDG that can deliver a new pressure value in less than 1 ms.