AVS 60th International Symposium and Exhibition
    Tribology Focus Topic Tuesday Sessions
       Session TR-TuP

Paper TR-TuP3
Wear and Oxidation Behaviors of Ti(C, N, O) Coatings

Tuesday, October 29, 2013, 6:00 pm, Room Hall B

Session: Tribology Poster Session
Presenter: Y.R. Cho, Ming Chi University of Technology, Taiwan, Republic of China
Authors: J.H. Hsieh, Ming Chi University of Technology, Taiwan, Republic of China
Y.R. Cho, Ming Chi University of Technology, Taiwan, Republic of China
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It has been known that the life time of Ti-based hard coatings is dependent on the oxidation rate of Ti. Here, Ti(C,N,O) coatings prepared by a unbalance magnetron sputtering were studied and compared using a static oxidation approach as well as a pin-on-disc tribometer. Ti(C,N,O) thin film prepared with different N2/O2 flow rates were deposited on M2 steel substrates. The films properties were analyzed by Raman spectroscopy, SEM and X-ray Diffraction. These samples then went through static oxidation and tribological testing. The surface morphology and the thickness of oxidation layer were obtained by using scanning electron microscopy (SEM).

In static oxidation, the formed titanium oxide (TiO2) was found to have mainly anatase structure at temperatures between 500ºC to 600ºC and transform to rutile structure at temperature higher than 600ºC. Through this study, oxidation rate and activation energy of oxidation for each sample were evaluated. It is found the samples exhibited higher activation energy could have higher oxidation resistance. These results are consistent with those obtained from wear testing.