| AVS 60th International Symposium and Exhibition | |
| Manufacturing Science and Technology | Tuesday Sessions |
| Session MS+AS+EL+EM+PS+TF-TuA |
| Session: | Manufacturing Challenges of Nanoscale Patterning |
| Presenter: | D.M. Mihut, The University of Texas Pan American |
| Authors: | D.M. Mihut, The University of Texas Pan American K. Lozano, The University of Texas Pan American W. Zhao, The University of Texas Pan American |
| Correspondent: | Click to Email |