AVS 60th International Symposium and Exhibition
    MEMS and NEMS Monday Sessions
       Session MN+AS+SS-MoM

Paper MN+AS+SS-MoM4
Fabrication and Characterization of Porous Carbon Nanotube Composite Resonators

Monday, October 28, 2013, 9:20 am, Room 102 A

Session: Fabrication and Multi-scale Interactions of Materials, Surfaces, and Interfaces at the Micro- and Nano-scale
Presenter: S. Noyce, Brigham Young University
Authors: S. Noyce, Brigham Young University
R.C. Davis, Brigham Young University
R.R. Vanfleet, Brigham Young University
D.D. Allred, Brigham Young University
B.D. Jensen, Brigham Young University
Correspondent: Click to Email
Porous resonators have the potential to overcome limitations in the micro-resonator field. For example, such structures with high surface area are potentially capable of higher detection limits than solid resonators when used as sensors, due to a higher mass change in a gas or liquid sensing environment. An important consideration for such resonators is the effect of thermo-elastic dampening. We present a versatile micro-resonator fabrication process in which carbon nanotubes are grown from a patterned catalyst, after which the space between the tubes is filled to various degrees of porosity with carbon through Chemical Vapor Deposition. Structural and mechanical characterization data regarding resonators fabricated with this process are presented.