AVS 60th International Symposium and Exhibition
    Graphene and Other 2D Materials Focus Topic Thursday Sessions
       Session GR-ThP

Paper GR-ThP5
Plasma Treatment of Thin Film Coated with Graphene Flakes for Sheet Resistance Reduction

Thursday, October 31, 2013, 6:00 pm, Room Hall B

Session: Graphene and Other 2D Materials Poster Session
Presenter: S.H. Kim, Sungkyunkwan University, Republic of Korea
Authors: S.H. Kim, Sungkyunkwan University, Republic of Korea
J.S. Oh, Sungkyunkwan University, Republic of Korea
G.Y. Yeom, Sungkyunkwan University, Republic of Korea
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Recently, study of transparent electrode using graphene flake has been attracted in this field. The advantage of graphene flake is the high productivity, scalability, and the flexibility on using various substrate materials. However, a thin film coated with graphene flakes generally showed a high sheet resistance due to the defects existed within graphene edges, domains, residual oxygen contents, etc. In this study, the effect of plasma treatment to thin film coated with graphene flake on the improvement of electrical properties was investigated. Graphene flake films were coated on the polyethylene terephthalate (PET) film by the spray coating system. By using a Cl2 plasma treatment, the sheet resistance was decreased with the increase of treatment time. However, when the thin film was treated too long, the sheet resistance was again increased with the increase of the treatment time. The optimum treatment time was related to the thickness of the thin film. In this experiment, at an optimum condition, it was observed that the surface resistance of the graphene film could be decreased higher than 50 %. The detailed mechanism on the change of graphene sheet resistance & structure will be presented.