| AVS 59th Annual International Symposium and Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Poster Session and Student-built Vacuum System Poster Competition |
| Presenter: | H. Bull, CNSE |
| Authors: | H. Bull, CNSE A. Antohe, SEMATECH G. Kane, CNSE G. Denbeaux, CNSE |
| Correspondent: | Click to Email |
Thermal management within vacuum chambers is sometimes a concern for temperature dependent vacuum processes. We describe a phenomenon in which using a magnetically levitated turbo molecular pump causes internal heating of a chamber. We measured the heat load based on a thermocouple inside the vacuum chamber, exposed line of sight to the magnetically levitated turbo pump. The measurements showed a temperature change of more than 10C based on the heat load from the pump. We also measured the effect of any heating due to gas flows and found that the dominant effect was not related to gas flows and was likely simply radiative heat transfer from the pump. The source of the heating of the pump is likely Ohmic heating due to eddy currents in the turbo pump.