| AVS 59th Annual International Symposium and Exhibition | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Poster Session and Student-built Vacuum System Poster Competition |
| Presenter: | M.A. Mamun, Old Dominion University |
| Authors: | M.A. Mamun, Old Dominion University P.A. Adderley, Thomas Jefferson National Accelerator Facility M.L. Stutzman, Thomas Jefferson National Accelerator Facility M. Poelker, Thomas Jefferson National Accelerator Facility |
| Correspondent: | Click to Email |
We present the results of an extensive study of the outgassing rates of four nominally identical stainless steel vacuum chambers. Chambers were either heat treated (semi-vacuum) at 400°C, coated with TiN, coated with SiO2 (SilcoGuard™), or heat treated then coated with SiO2. The outgassing rates were measured at a variety of room temperatures to determine the temperature dependence and compare to theoretical models of diffusion- or recombination-limited outgassing. In addition, outgassing rates were evaluated following venting to air and re-baking at 150°C and 250°C to simulate the impact of putting a chamber into service.