AVS 59th Annual International Symposium and Exhibition
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP10
Novel Light Sputter Ion Pump with Neodymium Iron Boron Magnets and the Low Outgassing Body

Tuesday, October 30, 2012, 6:00 pm, Room Central Hall

Session: Vacuum Technology Poster Session and Student-built Vacuum System Poster Competition
Presenter: T. Ha, Pohang University of Science and Technology, Republic of Korea
Authors: T. Ha, Pohang University of Science and Technology, Republic of Korea
S. Chung, Pohang University of Science and Technology, Republic of Korea
C.D. Park, Pohang University of Science and Technology, Republic of Korea
Correspondent: Click to Email

A light sputter ion pump for ultra high vacuum was fabricated using 5-mm-thick neodymium iron boron (NdFeB) magnets. The weight of the pump was reduced by 30%, compared with conventional sputter ion pumps using ferrite magnets. For the sake of uniformity of magnetic field, three pieces of magnet were combined into a 100 mm x 150 mm magnet block for the 30 l/s pumping element. The authors coped with the low working temperature (below 150oC) of the NdFeB magnets by forming a pure and dense chromium oxide film on the inner surface of the stainless steel pump body. With this vacuum thermal oxidation, the outgassing rate of water and hydrogen was considerably reduced so that a high temperature bakeout was unnecessary. The ultimate pressure achieved by the developed pump was much lower than 10-10 mbar even with a low bakeout temperature at 100oC.