| AVS 59th Annual International Symposium and Exhibition | |
| Thin Film | Wednesday Sessions |
| Session TF+SE+NS-WeM |
| Session: | Glancing Angle Deposition (GLAD) |
| Presenter: | J.M. LaForge, University of Alberta, Canada |
| Authors: | J.M. LaForge, University of Alberta, Canada G. Ingram, University of Alberta, Canada M.T. Taschuk, University of Alberta, Canada M.J. Brett, University of Alberta, Canada |
| Correspondent: | Click to Email |
Texture evolution during oblique angle deposition (OAD) and glancing angle deposition (GLAD) is of fundamental interest and important applications. As the distribution of size, shape and orientation of crystal grains impacts film electrical, optical, magnetic and mechanical properties control over texture evolution is important to optimizing performance. Morphology and crystal texture of OAD or GLAD nanostructured films is influenced by the orientation of the substrate relative to the collimated vapor flux, namely angle of incidence and the azimuthal angle, during deposition. Previous work has demonstrated control over the out-of-plane orientation through changes in the angle of incidence or azimuthal motion of substrate (e.g. stationary or continuous rotation).[1][2] However, work on the development of in-plane orientation has focused on material kinetic effects, such as deposition temperature, residual gas concentration, and deposition rate rather than substrate motion.[3][4]
We have deposited iron nanocolumns that have a tetrahedral apex and an out-of-plane texture (fiber texture) at a deposition angle of 88° under continuous substrate rotation. It is possible to induce in-plane crystal texture and morphological orientation by engineering the azimuthal distribution of the flux to match the symmetry of the nanocolumns (i.e. 3-fold rotational symmetry). Thus, biaxially textured nanocolumns with an in-plane alignment that is predominantly controlled by substrate motions (or flux configuration) can be created using this technique. In principle, this method could be generalized to nancolumns with 4-fold and 6-fold azimuthal symmetry and therefore provides a mechanism to form biaxially textured, nanostructured films from a variety of materials deposited on amorphous or crystalline substrates.
[1] P. Morrow, F. Tang, T. Karabacak, P.-I. Wang, D.-X. Ye, G.-C. Wang, T.-M.T.-M. Lu, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films2006, 24, 235.
[2] R. Krishnan, T. Parker, S. Lee, T.-M. Lu, Nanotechnology2009, 20, 465609.
[3] K. Okamoto, T. Hashimoto, K. Hara, M. Kamiya, H. Fujiwara, Thin Solid Films1985, 129, 299-307.
[4] K. Okamoto, T. Hashimoto, K. Hara, M. Kamiya, H. Fujiwara, Thin Solid Films1987, 147, 299-311.