AVS 59th Annual International Symposium and Exhibition
    Thin Film Tuesday Sessions
       Session TF+AS-TuA

Paper TF+AS-TuA10
Non-Destructive Element Specific Density Depth Profiling by Resonant Soft X-ray Reflectometry

Tuesday, October 30, 2012, 5:00 pm, Room 10

Session: Modeling and Analysis of Thin Films
Presenter: S. Macke, Max Planck - UBC Centre for Quantum Materials, Canada
Authors: S. Macke, Max Planck - UBC Centre for Quantum Materials, Canada
A. Radi, University of British Columbia, Canada
R. Sutarto, Canadian Light Source, Canada
G. Christiani, Max-Planck-Institute for Solid State Research, Germany
G. Logvenov, Max-Planck-Institute for Solid State Research, Germany
G. Sawatzky, University of British Columbia, Canada
B. Keimer, Max-Planck-Institute for Solid State Research, Germany
V. Hinkov, Max Planck - UBC Centre for Quantum Materials, Canada
Correspondent: Click to Email

X-ray resonant reflectometry (XRR) is the ideal tool to study the depth resolved and element-specific electronic structure of multilayer films. Besides the structural parameters of thin films like thicknesses and roughnesses one is sensitive to the dielectric tensor of the film which allows to retrieve depth profiles of the magnetic, orbital[1] and valence configuration.

Due to the complex physics of reflectometry this measurement method needs sophisticated tools to analyze the results quantitatively [2]. The issues arising with this method are addressed and discussed.

By changing angle, energy and polarization of the incoming beam complete reflectivity maps can be measured leading in principle to an accurate picture of the depth resolved electronic states of thin films. The standard model used in reflectometry is based on compound layers with a defined thickness, roughness and dielectric tensor. But such a simple model is usually not capable to reproduce a full measured reflectivity map. The main reasons are especially contaminations, additional oxide layers and interdiffusion between layers.

However, introducing a layer system based on the element specific atomic density and scattering factors instead of dielectrics tensors allows more degrees of freedom for the system and allows to reproduce the reflectivity maps. Thereby the advanced model is capable to retrieve the element specific density profiles of thin films.

The method is introduced by analyzing a simple film of PrNiO3 grown on an LSAT substrate. The reflectivity map is measured from 500eV to 1100eV.

[1] E. Benckiser et. al., Nature Materials 10, 189 (2011)

[2] ReMagX, www.simulationcorner.net/ReMagX/